Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Description

Small and compact, suitable for R&D purposes

Features of Plasma Cleaner (Parallel Electrode, Compact) (PiPi)

Small and compact, suitable for R&D purposes: Compact design, RIE (Reactive Ion Etching) mode
Feature: Economical plasma cleaning machine
Feature: Simple plasma processing operation
Feature: Among the plasmatized gases, in addition to ions and electrons, there are electrically neutral atoms and molecules that electrons have moved to the electrical excitation.
Feature: By sputtering effect by ions, it is possible to remove not only organic matter on the surface of the object but also inorganic matter.

Model	PiPi
Controller	Sequencer
Weight	50kg
Plasma mode	RIE (reactive ion etching)
Electrode structure	Parallel flat panel type
Electrode dimensions	W130×D130mm
Internal dimensions	W230×D130×H100mm
External dimensions	W438×D520×H565mm
Power Source (50/60Hz)	AC115V/AC220V Single phase with step-down transformer
Vacuum meter	Bourdon gauge
Operation/display unit	4.5-inch monochrome STN touch panel
High-frequency out-put power	50-200W
Reference oscillator	Quarts oscillator
Oscillation frequency	13.56MHz
Oscillation frequency 2	Manual setting knob
Matching Method	Auto tuning
Purge gas	N2 1/4-inch bite type tube fitting
Reaction gas	Ar mass flow meter 1/4-inch bite type tube fitting
Internal dimensions（W×D×H mm）	230×130×100mm
External dimensions（W×D×H mm）	438×520×565mm
Power Source	115V /220V Single phase with step-down transformer