Plasma Reactor (Barrel Chamber) (PR301)

Plasma Reactor (Barrel Chamber) (PR301)

Plasma Cleaner (Parallel Electrode) (PDC610)Vacuum Drying Oven, Shelf heater type (DP610HP)
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Description

Compact, Barrel Type, Low Temperature Ashing Device

Features of Plasma Reactor (Barrel Chamber) (PR301)

Wide range of application such as ashing, etching, dry cleaning, etc.
RF Power: 300W
Feature
Space-saving due to the compact design
Feature
Adjustable RF power for various application
Feature
Flexible setting range of output to cope with a variety of testings

Additional information

Model

PR301
Reaction Chamber

Pyrex Glass φ118 × L160mm x 1 chamber
Weight

34kg
Item Code

215008
System

DP mode, Barrel type
High Frequency Output

Max. 300W
Oscillation frequency

13.56MHz
Tuning Method

Manual biaxial
Reaction gas System

1 system (oxygen), flow meter
Control System

Auto pressure regulation and Auto leakage bulb
Gas Connection Port

SUS, Teflon, copper and brass
External dimensions

W438 × D520 × H556mm (without projection）
Internal dimensions（φ×D mm）

φ118×160mm
External dimensions（W×D×H mm）

438×520×660mm
Remarks(dimensions)

118φ x 160Dmm x 1 chamber
Power Source

AC115V/220VV
Single phase

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