Description

Compact, Barrel Type, Low Temperature Ashing Device

Features of Plasma Reactor (Barrel Chamber) (PR510)

Designed with large chamber size made of quartz considered almost completely resistant against most plasma processes

RF Power: Max. 500W

Feature

Space-saving design with oscillation section integrated with a portion of the chamber

Feature

Equipped with a large quartz chamber (φ215mm) which can process bigger testing samples

Feature

Outstanding operability and safety by the automatic tuning system equipped as a standard function