Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Cleaner (Parallel Electrode) (PDC610)Vacuum Drying Oven, Shelf heater type (DP610HP)
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Description

Suitable for dry cleaning process such as the removal of organic substances, oxidized film, and for surface cleaning, etching, etc.

Features of Plasma Cleaner (Parallel Electrode) (V1000)

Plasma Surface Cleaning Device
The electrodes can be replaced by specially developed electrodes to improve the plasma efficiency
Feature
High-precision matching unit and highly reliable RF generator

Additional information

Model

V1000
Item Code

328212
Plasma mode

DP/RIE
Oscillation frequency

13.56MHz
RF Power

1,000W
Stage Dimensions

280W × 280D mm　Parallel flat stage
Reaction gas

Mass flow control, 2 system + 1 for purge gas
Vacuum Pump

Included, Approx. 1,000L/min exhaust volume
Safety device

Door switch, Interlock of side panel, Emergency stop switch, Overheat prevention device
Internal dimensions（W×D×H mm）

400×400×380mm
External dimensions（W×D×H mm）

700×800×1600mm
Remarks(dimensions)

Stage dimensions: 280W x 280D mm
Power Source

3P 200V to 415V
A step-down transformer is required to meet the local voltage (from the local voltage to 3-phase AC200)
Weight

1000kg

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