Description
Small and compact, suitable for R&D purposes
Features of Plasma Cleaner (Parallel Electrode, Compact) (PiPi)
- Small and compact, suitable for R&D purposes
- Compact design, RIE (Reactive Ion Etching) mode
- Feature
- Economical plasma cleaning machine
- Feature
- Simple plasma processing operation
- Feature
- Among the plasmatized gases, in addition to ions and electrons, there are electrically neutral atoms and molecules that electrons have moved to the electrical excitation.
- Feature
- By sputtering effect by ions, it is possible to remove not only organic matter on the surface of the object but also inorganic matter.
