Plasma Surface Treatment Device
Features of Plasma Cleaner (Parallel Electrode) (PDC200)
| Model | PDC200 |
|---|---|
| Stage Size | W250 × D170mm |
| Weight | 100kg |
| Item Code | 328210 |
| Plasma mode | RIE（DP mode is optional） |
| Electrode structure | Parallel flat stage |
| RF Power | MAX. 300W |
| Oscillation frequency | 13.56MHz Quartz Oscillator |
| Display | LED touch panel |
| Chamber Dimensions | W400 × D250 × H150mm |
| Chamber Material | Aluminium |
| Reaction gas | 2 systems（Ar, O2） |
| Purge gas | N2 or Dry air |
| Reaction gas Flow Control | attribute:Flow meter |
| Vacuum Pump | Not included |
| Chamber Material 2 | Reaction Gas: 2 points, Purge Gas: 1 point |
| External Dimensions / Weight | W540 × D600 × H600mm / Approx. 100kg |
| Internal dimensions（W×D×H mm） | 400×250×150mm |
| External dimensions（W×D×H mm） | 540×600×600mm |
| Power Source | AC115/220V |
