Small and compact, suitable for R&D or any other dry cleaning processes
Features of Plasma Cleaner (Parallel Electrode) (PDC210)
| Model | PDC210 |
|---|---|
| Reaction gas | 2 systems（Ar, O2） |
| Power Source | AC200 to AC415V |
| External dimensions（W×D×H mm） | 540×600×600mm |
| Internal dimensions（W×D×H mm） | 400×250×150mm |
| External Dimensions / Weight | W540 × D600 × H600mm / Approx. 105kg |
| Chamber Material 2 | Reaction Gas: 2 points, Purge Gas: 1 point |
| Vacuum Pump | Not included |
| Reaction gas Flow Control | Mass flow controller |
| Purge gas | N2 or Dry air |
| Chamber Material | Aluminium |
| Stage Size | W250 × D170mm |
| Chamber Dimensions | W400 × D250 × H150mm |
| Display | LED touch panel |
| Oscillation frequency | 13.56MHz Quartz Oscillator |
| RF Power | MAX. 500W |
| Electrode structure | Parallel flat stage |
| Plasma mode | RIE（DP mode is optional） |
| Item Code | 328211 |
| Weight | 105kg |
