Plasma Cleaner (Parallel Electrode) (PDC610)

Plasma Cleaner (Parallel Electrode) (PDC610)
Plasma Cleaner (Parallel Electrode) (PDC610)

Plasma Cleaner (Parallel Electrode) (PDC610)

Double Chamber Incubator (Natural Convection & Low Temp.) (INC820)Plasma Cleaner (Parallel Electrode) (PDC510)
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Description

Plasma Surface Treatment Device

Features of Plasma Cleaner (Parallel Electrode) (PDC610)

Compact plasma cleaner for R&D or any other wide range of applications
Max. RF power 600W
Feature
RIE / DP mode switchable
Feature
Electrodes can be set among 1 to 3 stages
Feature
Integrated data logger can be installed (Optional)
Feature
Matching point memory function can be installed (Optional)

Additional information

Model

PDC610
Chamber Material

Aluminium
Weight

180kg
Plasma mode

RIE and DP mode changeable by touch panel
Electrode structure

3-stage independent parallel flat stage
RF Power

MAX. 600W
Oscillation frequency

13.56MHz　Quartz Oscillator
Chamber Dimensions

W350 × D270 × H300mm
Stage Size

W250 × D220mm x 3 stages
Reaction gas

2 systems（Ar, O2）
Purge gas

N2 or Dry air
Vacuum Pump

Not included
Chamber Material 2

Reaction Gas: 2 points, Purge Gas: 1 point
Oscillation frequency 2

Manual setting on LED touch panel
Internal dimensions（W×D×H mm）

350×270×300mm
External dimensions（W×D×H mm）

600×722×700mm
Power Source

AC200 to 415V
Three phase with step-down transformer

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