Plasma Reactor (Barrel Chamber) (PR200)

Plasma Reactor (Barrel Chamber) (PR200)
Plasma Reactor (Barrel Chamber) (PR200)

Plasma Reactor (Barrel Chamber) (PR200)

Plasma Cleaner (Parallel Electrode) (PDC610)Vacuum Drying Oven, Shelf heater type (DP610HP)
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Description

Compact, Barrel Type, Low Temperature Ashing Device

Features of Plasma Reactor (Barrel Chamber) (PR200)

Wide range of application such as ashing, etching, dry cleaning, etc.
RF Power: 200W
Feature
Space-saving due to the compact design
Feature
Adjustable RF power for various application
Feature
Flexible setting range of output to cope with a variety of testings

Additional information

Model

PR200
Reaction Chamber

Pyrex Glass φ100× L160mm
Weight

25kg
Item Code

215016
System

DP mode, Barrel type
High Frequency Output

Max. 200W
Oscillation frequency

13.56MHz
Tuning Method

Automatic
Reaction gas System

1 system (oxygen), flow meter
Control System

Manual leakage bulb
Gas Connection Port

SUS、Teflon
External dimensions

W350 × D400× H500mm (without projection）
Accessories

Sample shelf
Internal dimensions（φ×D mm）

φ100×160mm
External dimensions（W×D×H mm）

350×400×500mm
Power Source

AC115VV
/AC220V

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